Gaard 676 Chemical Mechanical Polisher
• Manufacturer: Novellus/SpeedFam IPEC
• 676 Mainframe with operator interface monitor
• System computers – SysCon(1), Polish Heads(4), End point(1), and C2C(1)
• Advantgaard 676 3.0 revS System Software
• Brookside Endpoint Detection System with configurable algorithm to detect endpoint
• 4 Mechanical polishing heads with Advanced Pad Motion
• 3 systolic pumps for slurry or DI H2O
• High flow DI H2O rinse valve configuration
• Upper and lower pneumatics panel
• Hoist for upper motor and tower removal
• 2 Pad conditioning systems
• Cassette to Cassette (C2C) system
• Genmark Gencobot multi-axis robot with wafer pickup paddle
• Wet cassette assembly with wafer sensor array
• Electrical cabinet with computer control station
• Safety interlocks on all panel doors and covers
