The MFC-7000 Integrated Flow Controller controls liquid and Slurry flows up to 4 Lpm to within 3% accuracy of the set point, while providing a quick response time of within 3 seconds for consistent control. Also, by utilizing its ultrasonic (non-invasive) based flow measurement, the Integrated Flow Controller offers direct flow measurement simultaneously, giving users a critical process parameter for monitoring and setting alarms. An optional pressure transducer can be integrated to monitor pressure.
* Significant Slurry/Chemical Savings
* Small FootprinConstructed of PTFE and PFA wetted parts; the Integrated Flow Controller was designed specifically for high purity, corrosive chemicals and CMP slurries. The splash proof exterior utilizes inert materials for harsh chemical environments. The patented ultrasonic flowmeter (with accuracies of 1% of reading) coupled with our Flow Control valve (with superb stepper control offering high accuracies with ultra-fast response times) allows for exceptional process control in a closed loop format.
150-1250ml (New) In original package
